Waferpedia

Tool family

SUSS MicroTec MJB4

SUSS MicroTecLithography1 entry

The SUSS MicroTec MJB4 is a manual mask/wafer aligner for research and development that aligns and exposes wafers up to 4 inch (100 mm) diameter.

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Models in this family

  1. MJB4i-line

    The SUSS MicroTec MJB4 is a manual mask/wafer aligner for research and development that aligns and exposes wafers up to 4 inch (100 mm) diameter.