SUSS MicroTec
MJB4
Plate 01Suss Microtech MJB4 Mask Aligner #62104
Bid ServicellcWatch on YouTubePlate 02Karl Suss MJB4 Mask Aligner Demonstration
ClassOneVideosWatch on YouTubePlate 03MJB4 Demo Video
Ollie Dunne Tara SemiWatch on YouTubePlate 04Süss MicroTec - MJB4
Virgin Lands - Technische VisualisierungWatch on YouTubePlate 05Suss Microtech MJB4 Mask Aligner #60960
Bid ServicellcWatch on YouTube
Wafer size
100mm
Node / era
about 800 nm
Vacuum
Soft, hard, and vacuum contact[2]
Performance
Top side alignment (TSA)[1]
Optics
Mercury (Hg) lamp[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- LED lithography
- MEMS
What do the numbers mean?
Vacuum & pumping1
Wafer handling3
Optics & imaging9
Performance4
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Contact optionsSoft, hard, and vacuum contact[2]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- User ManualManualepfl.ch
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MJB4 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MJB4 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MJB4 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MJB4 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MJB4 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the MJB4 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]pnf.uchicago.edu — pnf.uchicago.edupnf.uchicago.edu
- [3]Equipment Resources | CNF — cnf.cornell.educnf.cornell.edu
- [4]Tool Details - Harvard CNS — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
- [5]苏斯贸易（上海）有限公司: MJB4: SUSS MicroTec — suss.com (Dec 1, 2010)web.archive.org
Last updated Jul 29, 2026.
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