Waferpedia

Tool family

SUSS MicroTec PM5

SUSS MicroTecTest & Probe1 entry

The SUSS PM5 is an analytical probe system intended for precise analysis of devices fabricated on wafers and substrates up to 150 mm in diameter.

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Models in this family

  1. PM5

    The SUSS PM5 is an analytical probe system intended for precise analysis of devices fabricated on wafers and substrates up to 150 mm in diameter.