Waferpedia

Tool family

SUSS MicroTec SD 12 Semi-Automatic Wet Processing

SUSS MicroTecWet Processing / Clean1 entry

SUSS MicroTec SD 12 Semi-Automatic Wet Processing System.

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Models in this family

  1. SD 12 Semi-Automatic Wet Processing

    The SUSS SD 12 Semi-Automatic Wet Processing System is a semi-automatic wet processing system with touch-screen IPC control and documented support for 150 mm and 152 mm round SEMI standard wafers.