Tool family
The Tegal 6550 is a plasma etch reactor/system for etching non-volatile metal and metal oxide films, with a dual-chamber platform and patented rinse-strip-rinse capability.
The Tegal 6550 is a plasma etch reactor/system for etching non-volatile metal and metal oxide films, with a dual-chamber platform and patented rinse-strip-rinse capability.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 6550 Spectra | — | 2000 | Described as the 6550 Spectra etch reactor/system with Spectra plasma source, dual-chamber platform, and rinse-strip-rinse capability. | web.archive.org[1] |