Tegal
6550
Wafer size
100mm
Introduced
2000
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- MRAM
- GMR devices
- FeRAM
- data storage
- next-generation system-on-a-chip applications
- telecommunications
- magnetic storage
- magnetic head and MRAM memory device technology
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The deposition shield was stated to address redeposition of wafer processing materials on reactor interior surfaces that can degrade power transfer, etch rate, uniformity, uptime, and throughput.
- The rinse-strip-rinse feature was stated to eliminate corrosion in MRAM, GMR, and thin magnetic-material fabrication.
What do the numbers mean?
Wafer handling1
Configuration & options9
- Primary application
- volume production of magnetic memory components such as MRAM and GMR devices[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 6550 Spectra | — | 2000 | Described as the 6550 Spectra etch reactor/system with Spectra plasma source, dual-chamber platform, and rinse-strip-rinse capability. | web.archive.org[3] |
What replaced it?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 6550 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 6550 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 6550 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 6550 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 6550 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
The operating principle of the 6550 is not documented in this record.
Answerable by: an equipment physicist or OEM application engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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