Tegal 900

Models in this family

1. 

   900

   The Tegal 900 is a plasma etch system used for applications including defreckling, backside nitride etching, and processing III-V materials.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   901 ACS	—	—	Advanced Control System upgrade with a Windows XP graphical user interface, pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security.	web.archive.org[1]
   901g	—	—	Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade.	web.archive.org[1]
   903e	—	—	Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade.	web.archive.org[1]
   901e	—	—	Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade.	web.archive.org[1]
   900 ACS	—	—	latest generation referenced in the source; includes pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, virtually unlimited recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security	web.archive.org[1]

Sources