Tegal
900
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- defreckling
- backside nitride etching
- processing III-V materials such as gallium arsenide (GaAs)
- high-speed broadband networks
- wireless telecommunications
- linear, mixed-signal and digital integrated circuits
What do the numbers mean?
Wafer handling3
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 901 ACS | — | — | Advanced Control System upgrade with a Windows XP graphical user interface, pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security. | web.archive.org[1] |
| 901g | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 903e | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 901e | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 900 ACS | — | — | latest generation referenced in the source; includes pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, virtually unlimited recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 900 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 900 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 900 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 900 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 900 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 900 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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