Tool family
The Tegal 900e Series is a single-wafer cassette-to-cassette plasma etch system for non-critical plasma etch processes on 3 in to 150 mm wafers.
The Tegal 900e Series is a single-wafer cassette-to-cassette plasma etch system for non-critical plasma etch processes on 3 in to 150 mm wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 900 ACS Series | — | — | Combines an Advanced Control System with the 900 series plasma etch platform; faster throughput, faster system calibration, touchscreen graphical user interface, integrated data logging, and factory automation support are stated for ACS. | web.archive.org[1] |
| 900 ACS | — | — | Advanced Control System upgrades for customers already invested in the Tegal 900e Series | web.archive.org[1] |