Waferpedia

Tegal

900e

Etch150mmTegal 900e family
Research Quality: 30% complete
Tegal900e
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What is it?

The source describes the Tegal 900 ACS Series as an advanced-control plasma etch line and states that customers already invested in the Tegal 900e Series can obtain field upgrades to the Advanced Control System. It also characterizes the 900e Series as a popular single-wafer cassette-to-cassette etch system used for non-critical plasma etch processes on 3 in to 150 mm wafers.

What can it run?

Process applications and technology nodes documented for this tool.

  • Non-critical plasma etch processes

What do the numbers mean?

Wafer handling2

Tool type
single wafer cassette-to-cassette etch system[1]
Accurate?
Wafer size
3 in to 150 mm wafers[1]
Accurate?

Control & software1

Control system
Advanced Control System (ACS) field upgrades available for customers already invested in the Tegal 900e Series[1]
Accurate?

Configuration & options1

Process
non-critical plasma etch processes[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
900 ACS SeriesCombines an Advanced Control System with the 900 series plasma etch platform; faster throughput, faster system calibration, touchscreen graphical user interface, integrated data logging, and factory automation support are stated for ACS.web.archive.org[1]
900 ACSAdvanced Control System upgrades for customers already invested in the Tegal 900e Seriesweb.archive.org[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 900e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 900e are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 900e are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 900e are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 900e is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 900e are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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