Tegal
Plate 01Forget the Steering Wheel! Stiga Gyro 900e Zero-Turn, Zero Emissions Review
The Tegal 900e Series is configured as a single-wafer cassette-to-cassette system, so wafers move from cassette to processing and then back to cassette through the tool.[3]
The Tegal 900 ACS Series adds an Advanced Control System with faster throughput, faster system calibration, a touchscreen graphical user interface, integrated data logging, and factory automation support for customers already invested in the Tegal 900e Series.[1][3]
The Tegal 900e Series is used for non-critical plasma etch processes.[3]
The Tegal 900e Series is used for non-critical plasma etch processes on wafers from 3 in to 150 mm.[3]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 900 ACS Series | — | — | Combines an Advanced Control System with the 900 series plasma etch platform; faster throughput, faster system calibration, touchscreen graphical user interface, integrated data logging, and factory automation support are stated for ACS. | web.archive.org[1] |
| 900 ACS | — | — | Advanced Control System upgrades for customers already invested in the Tegal 900e Series | web.archive.org[1] |
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The following facts about the 900e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 900e are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 900e are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 900e are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 900e is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 900e are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Last updated Oct 13, 2026.
The Tegal 981 is a plasma etch tool for thin film head fabrication, described as achieving precise photoresist descum with 4:1 anisotropy at low processing temperatures in oxygen-free plasmas.
The Tegal 981ACS is a scaled-up version of the 901ACS diode RIE system built for handling 150 mm and 200 mm wafers and large-area etching operations.
The Applied Materials 0010-47763 is an electrostatic chuck (ESC) assembly used in semiconductor etching processes.