Waferpedia

Tool family

Tegal 901G

TegalEtch1 entry

The Tegal 901G is a diode plasma etcher specially configured for GaAs processing and used for etching high-performance devices on gallium arsenide substrates.

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Models in this family

  1. 901Gintroduced 1999

    The Tegal 901G is a diode plasma etcher specially configured for GaAs processing and used for etching high-performance devices on gallium arsenide substrates.