Tegal
901G
Wafer size
75 mm to 150 mm round substrates; square and rectangular substrates
Introduced
1999
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- etching high performance devices on GaAs substrates
- cellular phones and other wireless communication products
- GaAs wireless applications
What do the numbers mean?
Wafer handling1
- Substrate sizes on platform
- 75 mm to 150 mm round substrates as well as square and rectangular substrates[2]
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 901G are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 901G are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 901G are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 901G are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 901G are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 901G is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]Tegal - Thin Film Manufacturing Equipment, Etch, Ferroelectrics Etch, Platinum Etch, Oxide Etch, Nitride Etch, Dry Etch, Plasma Etch — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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