Waferpedia

Tool family

Tegal 903

TegalEtch1 entry

The Tegal 903 is a diode plasma etch tool for semiconductor applications, and source material identifies a 903 ACS version with 3-inch and 100mm–150mm wafer size support.

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Models in this family

  1. 903introduced 2000

    Cited variants

    DesignationGenerationVintageChangesSource
    903 ACS———web.archive.org[1]
    903e———web.archive.org[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org