Tegal
903
Wafer size
100mm
Introduced
2000
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- non-critical via etch
- pad passivation etch
- oxide contact/via etch
- LDD spacer etch
- polyimide ILD etch
- resist/SOG planarization
- etching oxide contacts
- production of memory chips
- production of data communication ICs
- production of microcontrollers
- production of multimedia ICs
- production of power management devices
What do the numbers mean?
Power & electrical1
- Reactors/materials
- narrow gap RF diode reactor; plasma etch of silicon oxide and silicon nitride materials[3]
Wafer handling2
- Wafer size support
- 75-150 mm round silicon and GaAs substrates; rectangular substrates from 100-125 mm on a side[2]
Configuration & options1
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Reactors/materialsnarrow gap RF diode reactor; plasma etch of silicon oxide and silicon nitride materials[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 903 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 903 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 903 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 903 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 903 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 903 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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