Waferpedia

Tool family

Tegal 980

TegalEtch1 entry

Tegal 980 ACS is a plasma etch system series described as serving the 200mm fab line.

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Models in this family

  1. 980

    Tegal 980 ACS is a plasma etch system series described as serving the 200mm fab line.

    Cited variants

    DesignationGenerationVintageChangesSource
    981 ACS———web.archive.org[1]
    983 ACS———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org