Tegal

980

Etch 200mm Tegal 980 family

Research Quality: 40% complete

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980 — web.archive.org — Fig. 01980web.archive.org^[1]

Wafer size

200mm

Performance

Faster throughput^[1]

What is it?

The Tegal 980 ACS Series is described as a durable and reliable non-critical plasma etch tool for the semiconductor industry, serving the 200mm fab line. The sources also state that the 980 series etch systems were used for volume production of magnetic recording heads and that the 980 ACS series supported high-volume fabrication of storage devices and photoresist treatment prior to critical electroplating processes.

What can it run?

Process applications and technology nodes documented for this tool.

Non-critical plasma etch processes for 200mm wafers
High-volume fabrication of storage devices
Photoresist treatment prior to critical electroplating processes
Silicon nitride dielectric etch
Oxide dielectric etch
Polymer etch treatments
Volume production of magnetic recording heads

What do the numbers mean?

Wafer handling2

Wafer size: 200mm^[1]
System type: Single wafer cassette-to-cassette etch system^[1]

Performance1

Throughput: Faster throughput^[1]

Control & software1

User interface: Touchscreen graphical user interface^[1]

Configuration & options5

Series name: 980 ACS Series^[1]
Process type: Plasma etch^[1]
Calibration: Faster system calibration^[1]
Data handling: Integrated data logging^[1]
Factory automation: Factory automation support^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
981 ACS	—	—	—	web.archive.org^[1]
983 ACS	—	—	—	web.archive.org^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 980 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 980 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 980 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 980 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 980 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 980 are on record.
Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]Press Release — web.archive.orgweb.archive.org
[3]Tegal - Thin Film Manufacturing Equipment, Etch, Ferroelectrics Etch, Platinum Etch, Oxide Etch, Nitride Etch, Dry Etch, Plasma Etch — web.archive.orgweb.archive.org