Waferpedia

Tool family

Tegal 983

TegalEtch1 entry

The Tegal 983 is a diode plasma etch tool for pad passivation, oxide contact/via, spacer, polyimide ILD, and resist/SOG planarization applications.

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Models in this family

  1. 983

    The Tegal 983 is a diode plasma etch tool for pad passivation, oxide contact/via, spacer, polyimide ILD, and resist/SOG planarization applications.