Waferpedia

Tegal

983

Etch125mmdown to 0.5 micronTegal 983 family
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Tegal983
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Wafer size

125mm

Node / era

down to 0.5 micron

What is it?

The Tegal 983 has a fixed electrode gap of 6 mm and is designed around a production-proven transport system. The source states that it accommodates 125 mm to 150 mm round silicon and GaAs substrates, with an option for rectangular substrates from 125 mm to 150 mm on a side, and that it is best suited for technology design rules down to 0.5 micron.

What can it run?

Process applications and technology nodes documented for this tool.

  • pad passivation etch
  • oxide contact/via etch
  • LDD spacer etch
  • polyimide ILD etch
  • resist/SOG planarization

What do the numbers mean?

Wafer handling2

Round substrate size
125 mm to 150 mm round silicon and GaAs substrates[2]
Accurate?
Rectangular substrate size
125 mm to 150 mm on a side[2]
Accurate?

Configuration & options5

Model
983[1]
Accurate?
Product name
983 ACS[1]
Accurate?
Category
Diode plasma etch tool[2]
Accurate?
Fixed electrode gap
6 mm[2]
Accurate?
Best-suited design rules
down to 0.5 micron[2]
Accurate?
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What replaced it?

  • siblingTegal 981— The source describes the 981 as a diode plasma etch tool in the same product family.source[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 983 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 983 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 983 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 983 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 983 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • No publicly documented compatible parts, consumables, or accessories for the 983 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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