Tegal
983
The Tegal 983 is a diode plasma etch tool. The Tegal 983 has a fixed electrode gap of 6 mm. The Tegal 983 is best suited for technology design rules down to 0.5 micron.[1][2]
Wafer size
125mm
Node / era
down to 0.5 micron
What it is
How it works
Where it fits in the process flow
Applications
The Tegal 983 accommodates 125 mm to 150 mm round silicon and GaAs substrates.[1][2]
The Tegal 983 can be configured for rectangular substrates from 125 mm to 150 mm on a side.[1][2]
The Tegal 983 is used for pad passivation etch, oxide contact or via etch, LDD spacer etch, polyimide ILD etch, and resist or SOG planarization.[1][3][2][4]
- pad passivation etch
- oxide contact/via etch
- LDD spacer etch
- polyimide ILD etch
- resist/SOG planarization
What do the numbers mean?
Wafer handling3
Configuration & options7
What replaced it?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 983 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 983 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 983 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 983 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 983 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 983 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]Tegal 983 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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