Waferpedia

Tool family

Tokyo Electron Alpha 805

Tokyo ElectronThermal / Diffusion2 entries
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Models in this family

  1. Alpha 805

    Tokyo Electron Alpha 805 is a furnace in the Thermal / Diffusion category with an 8-inch wafer size.

  2. Alpha 805 D

    The Tokyo Electron Alpha 805 D is a furnace with an 8-inch wafer size.

All entries

  1. Alpha 805Tokyo Electron

    Tokyo Electron Alpha 805 is a furnace in the Thermal / Diffusion category with an 8-inch wafer size.

    CategoryThermal / Diffusion
    5 specs
  2. Alpha 805 DTokyo Electron

    The Tokyo Electron Alpha 805 D is a furnace with an 8-inch wafer size.

    CategoryThermal / Diffusion
    6 specs