Waferpedia

Tool family

Tokyo Electron Alpha 805

Tokyo ElectronThermal / Diffusion2 entries
LinkedIn X Email

Models in this family

  1. Alpha 805
  2. Alpha 805 D

    The Tokyo Electron Alpha 805 D is a furnace with an 8-inch wafer size.

All entries

  1. Alpha 805Tokyo Electron
    CategoryThermal / Diffusion
    1 spec
  2. Alpha 805 DTokyo Electron

    The Tokyo Electron Alpha 805 D is a furnace with an 8-inch wafer size.

    CategoryThermal / Diffusion
    1 spec