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Tool family

Tokyo Electron Expedius

Tokyo ElectronWet Processing / Clean2 entries
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Models in this family

  1. Expedius
  2. Expedius Plus

    Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.

All entries

  1. ExpediusTokyo Electron
    CategoryWet Processing / Clean
    1 spec
  2. Expedius PlusTokyo Electron

    Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.

    CategoryWet Processing / Clean
    23 specs