Tokyo Electron

Expedius Plus

Wet Processing / Clean Tokyo Electron Expedius family

Research Quality: 30% complete

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Expedius Plus — Inventory photo — Fig. 01Expedius PlusInventory photo^[1]

Power

950 kHz, 2400W (600*4)^[1]

Gas delivery

auto concentration feedback^[1]

What is it?

Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.

Why won't it start?

Documented failure modes, common issues, and field considerations.

IPA Detect Sensor damage
SPM Bath damage

What do the numbers mean?

Power & electrical1

Megasonic: 950 kHz, 2400W (600*4)^[1]

Gas & chemistry1

Chemical spiking: auto concentration feedback^[1]

Configuration & options21

Application: Pre-Diffusion Clean^[1]
Bath-1: SPM^[1]
Operating: 110 - 150°C, H2SO4/H2O2 (3:1), circulation^[1]
Bath Material: Quartz^[1]
Bath-2: QDR (hot)^[1]
Operating: DIW rinse (75°C, 40 – 80 L/min)^[1]
Bath Material: PTFE^[1]
Bath-3: APM^[1]
Operating: 35 - 85°C, NH4OH/H2O2/DIW (1:1:15), 15 L/min, circulation^[1]
Bath-4: POU^[1]
Operating: 70°C, NH4OH/H2O2 DIW Shower (hot / cold)^[1]
Bath-5: HPM^[1]
Operating: 35 - 80°C, HCL/H2O2/DIW (1:1:5)^[1]
Bath-6: QDR (hot)^[1]
Operating: DIW rinse (75°C, 40 – 80 L/min) - Bath Material: PTFE^[1]
Dryer: SD2^[1]
Operating: 49% DHF (1:200), IPA/N2 200°C, 100 L/min^[1]; Resistivity monitoring (Horiba)^[1]
Operating: DIW rinse (75°C, 40 – 80 L/min) Injection: H2O2/NH4OH^[2]
Dryer: SD2*2^[2]; No HDD^[2]

Vintage & configurations

2007Vintage^[1]
Source states 2007 Vintage.

Interested in this tool?

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Veeco Waferstorm M 3305 Lift Off— Same function class: Wet Processing / Clean, UnknownCompare in depthsource^[3]
Lam Research SEZ SP 304— Same function class: Wet Processing / Clean, UnknownCompare in depthsource^[4]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Chemical spikingauto concentration feedback^[1]
Megasonic950 kHz, 2400W (600*4)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Expedius Plus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the Expedius Plus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Expedius Plus are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Expedius Plus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Expedius Plus are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Expedius Plus are on record.
Answerable by: university cleanroom staff or an OEM application specialist