Tokyo Electron NS 300

Models in this family

1. 

   NS 300 + Wafer

   Tokyo Electron NS 300 + Wafer Scrubber is a wet-process wafer scrubber for 8-inch wafers.

2. 

   NS 300 Z Wafer

   The Tokyo Electron NS 300 Z Wafer Scrubber is a 12-inch wafer scrubber with software version 6.00.26.2 and a 208 AC, 3-phase power rating.