Tokyo Electron Tactras

Models in this family

1. 

   Tactrasproduced 2006–

   The Tokyo Electron Tactras is a series of plasma etch systems for 300mm wafers, first launched in 2006.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Tactras-UDEMAE	—	2021	System for 300mm power devices, enhanced plasma reactor for 300mm compatibility, features new function to suppress particle generation in wafer bevel area.	tel.com[1]

Sources