Waferpedia

Tool family

Tokyo Electron Telius

Tokyo ElectronEtch3 entries
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Models in this family

  1. Telius Dry

    The TEL Tokyo Electron Telius is a dry etcher for 300 mm wafers.

  2. Telius Poly
  3. Telius SP Vesta Dry

    The Telius SP Vesta is a dry etcher for 12-inch wafers manufactured by Tokyo Electron (TEL).

All entries

  1. Telius DryTokyo Electron

    The TEL Tokyo Electron Telius is a dry etcher for 300 mm wafers.

    CategoryEtch
    7 specs
  2. Telius PolyTokyo Electron
    CategoryEtch
    1 spec
  3. Telius SP Vesta DryTokyo Electron

    The Telius SP Vesta is a dry etcher for 12-inch wafers manufactured by Tokyo Electron (TEL).

    CategoryEtch
    2 specs