Waferpedia

Tool family

Tokyo Electron U 2

Tokyo ElectronEtch2 entries
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Models in this family

  1. U 2 e - 655 PP

    The Tokyo Electron U 2 e - 655 PP is a deposition-related wafer processing system for 6 inch wafers with two chambers.

  2. U 2 E 655 PP RIE

All entries

  1. U 2 e - 655 PPTokyo Electron

    The Tokyo Electron U 2 e - 655 PP is a deposition-related wafer processing system for 6 inch wafers with two chambers.

    CategoryDeposition
    6 specs
  2. U 2 E 655 PP RIETokyo Electron
    CategoryEtch
    2 specs