Tool family

Tokyo Electron U 2

Tokyo ElectronDeposition2 entries

Models in this family

U 2 e - 655 PP
The Tokyo Electron U 2 e - 655 PP is a deposition-related wafer processing system for 6 inch wafers with two chambers.
U 2 E 655 PP RIE
The Tokyo Electron U 2 E 655 PP RIE is a reactive ion etcher in the etch category.

All entries

U 2 e - 655 PPTokyo Electron
The Tokyo Electron U 2 e - 655 PP is a deposition-related wafer processing system for 6 inch wafers with two chambers.
CategoryDeposition
10 specs
U 2 E 655 PP RIETokyo Electron
The Tokyo Electron U 2 E 655 PP RIE is a reactive ion etcher in the etch category.
CategoryEtch
9 specs