Waferpedia

Tool family

Tokyo Electron Unity Me

Tokyo ElectronEtch1 entry

TEL Unity Me is an automatic plasma etching production tool from Tokyo Electron, configured at CMi with a 100mm wafer cassette loader, a transfer chamber, and a DRM process module.

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Models in this family

  1. Unity Me

    TEL Unity Me is an automatic plasma etching production tool from Tokyo Electron, configured at CMi with a 100mm wafer cassette loader, a transfer chamber, and a DRM process module.