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Tool family

Tokyo Electron Unity SCCM Shin Oxide

Tokyo ElectronEtch1 entry

Tokyo Electron Unity SCCM Shin Oxide Etcher.

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Models in this family

  1. Unity SCCM Shin Oxide

    The Tokyo Electron Unity SCCM Shin Oxide Etcher is a 12-inch etcher with an EFEM and 3 load ports.