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Tokyo Electron

Unity SCCM Shin Oxide

Unity SCCM Shin Oxide — Inventory photo
Fig. 01Unity SCCM Shin OxideInventory photo[1]

Power

Daihen AGA-50B 60 MHz 5KW[1]

Vacuum

Shimadzu Turbo Pumps[1]

What is it?

The Tokyo Electron Unity SCCM Shin Oxide Etcher is a 12-inch etcher with an EFEM and 3 load ports.

What do the numbers mean?

Power & electrical3

Daihen AGA-50B 60 MHz 5KW[1]
Accurate?
Daihen WGA-50E RF Gen Bottom 2 MHz 5 KW[1]
Accurate?
Kyosan DC Power supplies[1]
Accurate?

Vacuum & pumping1

Shimadzu Turbo Pumps[1]
Accurate?

Configuration & options5

Tool type
TSP-30555SSS[1]
Accurate?
EFEM with 3 Load Ports[1]
Accurate?
Fitted with 3 Etch Process Chambers, each with:[1]
Accurate?
Daihen DGP-120A2[1]
Accurate?
Vat Gate Valves[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationDaihen AGA-50B 60 MHz 5KW[1]
  • ConfigurationDaihen WGA-50E RF Gen Bottom 2 MHz 5 KW[1]
  • ConfigurationShimadzu Turbo Pumps[1]
  • ConfigurationKyosan DC Power supplies[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Unity SCCM Shin Oxide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity SCCM Shin Oxide are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Unity SCCM Shin Oxide are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Unity SCCM Shin Oxide are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Unity SCCM Shin Oxide are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Unity SCCM Shin Oxide is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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