Waferpedia

Tool family

Ulvac Ei 5

UlvacDeposition1 entry

Ulvac Ei 5 Evaporator.

Email

Models in this family

  1. The Ulvac Ei 5 is a deposition system. In general reference terms, machines in this class form thin films on substrate surfaces under controlled vacuum conditions as part of device, optics, and materials fabrication.