Ulvac
Ei 5
Plate 01Model：ei-5 バッチ式高真空蒸着装置 – 研究開発および少量生産に最適なソリューション
アルバックテクノ株式会社Watch on YouTubePlate 02Model：ei-5 拡張Item－ 新型EBガン、クライオ改善Item、FABISEQのご紹介
アルバックテクノ株式会社Watch on YouTube
What it is
General reference — not yet source-verifiedThe Ulvac Ei 5 belongs to the deposition equipment class. Such systems are used to place a controlled layer of material onto a wafer, panel, mask, optic, or other prepared substrate so that the deposited film can serve an electrical, optical, chemical, magnetic, or protective function in a later process sequence.
How it works
General reference — not yet source-verifiedSuch systems usually emphasize control of chamber atmosphere, substrate handling, source delivery, energy input, and process timing so that film properties remain repeatable across the substrate and from run to run. Process development in this equipment class commonly focuses on film stress, density, adhesion, coverage, contamination control, stoichiometry, interface quality, and the interaction between the deposited layer and the underlying surface.
Applications
General reference — not yet source-verifiedMachines of this class are generally used wherever engineered thin films are required. Typical applications include microelectronic layer formation, optical coatings, electrode and interconnect fabrication, diffusion or adhesion barrier formation, protective surface coatings, sensor structures, magnetic or functional materials deposition, and research or pilot-line process development involving controlled thin-film stacks.
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
Wafer handling2
Control & software1
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does a deposition system do?General reference — not yet source-verified
A deposition system forms a thin layer of material on a substrate surface under controlled process conditions. The resulting film can provide electrical conduction, insulation, optical behavior, chemical resistance, adhesion promotion, surface protection, or another engineered function.
What film attributes are usually important in deposition processes?General reference — not yet source-verified
Engineers commonly pay attention to thickness control, uniformity, composition, adhesion, coverage, stress, density, surface roughness, contamination level, and interface quality. The importance of each attribute depends on whether the layer serves an electrical, optical, structural, or protective role.
Where does deposition fit in a manufacturing flow?General reference — not yet source-verified
Deposition generally follows substrate preparation and precedes any later step that relies on the new layer. After deposition, the film may be patterned, etched, annealed, measured, stacked with additional layers, or sealed within a finished structure.
Not publicly documented
The following facts about the Ei 5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ei 5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Ei 5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Ei 5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Ei 5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Ei 5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
Last updated Oct 19, 2026.
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