Ulvac

Ei 5

Deposition Ulvac Ei 5 family

Research Quality: 20% complete

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Ei 5 — Inventory photo — Fig. 01Ei 5Inventory photo^[1]

Plate 01Model：ei-5 バッチ式高真空蒸着装置 – 研究開発および少量生産に最適なソリューション
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Plate 02Model：ei-5 拡張Item－新型EBガン、クライオ改善Item、FABISEQのご紹介
アルバックテクノ株式会社Watch on YouTube

Power

6 kW x 4 sets^[2]

Vacuum

ULVAV CRYO-U16P+C30VR X1^[1]

What is it?

What do the numbers mean?

Power & electrical3

EB source: ULVAC EGO-40M+Power supply EPS-1000F 10kW x1 set^[1]
EB source: ULVAC EGL-406M+Power supply EPS-1000F x1 set^[2]
Lamp heater: 6 kW x 4 sets^[2]

Vacuum & pumping3

Main vacuum pump: ULVAV CRYO-U16P+C30VR X1^[1]
Assisted pump: Mechanical pump ULVAC EC803^[1]
Vacuum gauge: ULVAC G-TRAN BMR2 ULVAC G-TRAN BRP2,SP1^[1]

Wafer handling2

Substrate rotation: Revolving flat plate type^[1]
Substrate heating: None^[1]

Control & software1

Deposition controller: ULVAC CRTM-9000^[1]

Configuration & options3

Resistance heating evaporation source: 6.8kW 3 sets^[1]
Deposition history: Au, PT, Ti^[1]
Deposition history: Fe, Ni, Zn, Al2O3, Cr, Al, C, W^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

EB sourceULVAC EGO-40M+Power supply EPS-1000F 10kW x1 set^[1]
Main vacuum pumpULVAV CRYO-U16P+C30VR X1^[1]
Assisted pumpMechanical pump ULVAC EC803^[1]
Vacuum gaugeULVAC G-TRAN BMR2 ULVAC G-TRAN BRP2,SP1^[1]
EB sourceULVAC EGL-406M+Power supply EPS-1000F x1 set^[2]
Lamp heater6 kW x 4 sets^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Ei 5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ei 5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Ei 5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Ei 5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Ei 5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Ei 5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report