Tool family
Ulvac Ei 7 L E-Beam
Ulvac Ei 7 L E-Beam Evaporator.
Models in this family
The Ulvac Ei 7 L is an e-beam evaporator with an auto loader, wafer transfer system, load lock chamber, process chamber, and operation panel, designed for depositing metals such as Al, Ni, Ti, Pt, and Au.
