Waferpedia

Tool family

Ulvac SDP 570 VMS In Line

UlvacDeposition1 entry

Ulvac SDP 570 VMS In Line Sputtering.

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Models in this family

  1. SDP 570 VMS In Line

    The Ulvac SDP 570 VMS In Line is a deposition sputtering tool with DC magnetron sputtering, manual substrate loading, and glass substrate handling.