Ulvac

SDP 570 VMS In Line

Deposition Ulvac SDP 570 VMS In Line family

Research Quality: 20% complete

LinkedIn X Email

SDP 570 VMS In Line — Inventory photo — Fig. 01SDP 570 VMS In LineInventory photo^[1]

Power

3 phase, 220 V, 60 Hz, 615 kVA^[1]

Vacuum

Vacuum Conditions:^[1]

What is it?

What do the numbers mean?

Power & electrical1

Required Electric Power: 3 phase, 220 V, 60 Hz, 615 kVA^[1]

Vacuum & pumping4

Vacuum Conditions:^[1]

Accurate?

Preheat Chamber: ≤ 1 × 10⁻⁶ Torr - Sputtering Chamber: ≤ 1 × 10⁻⁶ Torr - Isolation Chamber: ≤ 1 × 10⁻⁶ Torr^[1]

Accurate?

Pump Down Time:^[1]

Accurate?

Preheat Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr - Removal Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr^[1]

Accurate?

Wafer handling2

Loader / Unloader: Manual substrate Loading)^[1]
Substrate Material: Glass^[1]

Dimensions & facilities1

Required Floor Space: Approx. W 7000 × L 32,000 × H 3000 mm^[1]

Configuration & options12

Sputter Method: (DC Magnetron Sputtering)^[1]
Takt Time (Cycle Time): 2.5 min^[1]; Elevator^[1]; Preparation Chamber^[1]; Isolation Room^[1]; Removal Chamber^[1]; Return Conveyor^[1]; Process Chamber:^[1]; Sputtering Chamber^[1]; Input Chamber -> Cathode Chamber -> Output Chamber^[1]; Sputtering Conditions:^[1]
Target Attachment Method: Metal bonding to backing plate^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Required Electric Power3 phase, 220 V, 60 Hz, 615 kVA^[1]
ConfigurationVacuum Conditions:^[1]
ConfigurationPreheat Chamber: ≤ 1 × 10⁻⁶ Torr - Sputtering Chamber: ≤ 1 × 10⁻⁶ Torr - Isolation Chamber: ≤ 1 × 10⁻⁶ Torr^[1]
ConfigurationPump Down Time:^[1]
ConfigurationPreheat Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr - Removal Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the SDP 570 VMS In Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SDP 570 VMS In Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SDP 570 VMS In Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SDP 570 VMS In Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SDP 570 VMS In Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SDP 570 VMS In Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report