The Ulvac SME 200 is a sputtering system used for thin film deposition.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| SME 200 J | — | — | 6-chamber configuration with target materials: PM2 platinum, PM3 BST, PM4 no chamber, PM5 BST, PM6 BST. | waferpedia.com[1] |