Tool family
Varian 3118 10 E E-Beam
Varian 3118 10 E E-Beam Evaporator.
Models in this family
The Varian 3118 10 E E-Beam Evaporator is an integrated system for deposition that includes vacuum pumps, a chamber, mounting pieces, a chiller, a power unit, a sweep controller, and an optical monitor.
