Varian

3118 10 E E-Beam

Deposition Varian 3118 10 E E-Beam family

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The Varian 3118 10 E E-Beam Evaporator is an integrated system for thin-film deposition. The system includes a Lamb UC 50/30 chiller, an ARCO Temescal high voltage power unit, a Temescal CV 8 sweep controller for beam positioning, and a DYN-Optics 580 D optical monitor for real-time film thickness control.^[1]^[2]

3118 10 E E-Beam — Inventory photo — Fig. 013118 10 E E-BeamInventory photo^[1]

Plate 01Varian 3118 E-beam Evaporator Thermal Evaporator used semiconductor equipment
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Power

High Voltage^[1]

Vacuum

Vacuum pumps, chamber, mounting pieces^[1]

Performance

Beam positioning & deposition uniformity^[1]

Optics

DYN-Optics 580 D Optical Monitor:^[1]

What it is

The Varian 3118 10 E E-Beam is an evaporation deposition system. The Varian 3118 10 E E-Beam is an integrated system for deposition that includes vacuum pumps, a chamber, mounting pieces, a chiller, a power unit, a sweep controller, and an optical monitor.^[1]^[2]

How it works

The Varian 3118 10 E E-Beam includes vacuum pumps, a chamber, mounting pieces, a power unit, a sweep controller, and an optical monitor. The sweep controller supports beam positioning and deposition uniformity, and the optical monitor supports real-time film thickness and deposition control.^[1]^[2]

Where it fits in the process flow

The Varian 3118 10 E E-Beam uses a vacuum chamber and vacuum pumps to support deposition under low-pressure conditions. The system uses an optical monitor for real-time thickness control during deposition runs.^[1]^[2]

Applications

General reference — not yet source-verified

An e-beam evaporator is used for thin-film deposition in semiconductor processing. The class is used when a material must be evaporated in vacuum and deposited as a film on a substrate.

What do the numbers mean?

Power & electrical3

High Voltage^[1]
Power unit: ARCO Temescal, high voltage^[1]
Power unit: ARCO Temescal Power Unit; high voltage^[1]

Vacuum & pumping3

Includes Vacuum pumps, Chamber, & Mounting Pieces^[1]
Included components: Vacuum pumps, chamber, mounting pieces^[1]
Included components: Vacuum pumps, chamber, and mounting pieces^[1]

Optics & imaging3

DYN-Optics 580 D Optical Monitor:^[1]
Optical monitor: DYN-Optics 580 D, real time film thickness and deposition control^[1]
Optical monitor: DYN-Optics 580 D Optical Monitor; real time film thickness and deposition control^[1]

Performance3

Beam positioning & deposition uniformity^[1]
Sweep controller: Temescal CV 8, for beam positioning and deposition uniformity^[1]
Sweep controller: Temescal CV 8 Sweep Controller; beam positioning and deposition uniformity^[1]

Control & software2

Temescal CV 8 Sweep Controller:^[1]

Accurate?

Real time film thickness & deposition control^[1]

Accurate?

Configuration & options13

Integrated System^[1]; System components are mounted in standard racks for easy integration^[1]; USA Lamb UC 50/30 Chiller:^[1]; Low Temp^[1]; Recirculating^[1]; Maintains system stability during deposition runs^[1]; ARCO Temescal Power Unit:^[1]
Chiller: Lamb UC 50/30, low temperature recirculating^[1]
System integration: Components mounted in standard racks^[1]
Make: Varian^[1]
Model: 3118 10 E E-Beam^[1]
Type: E-Beam Evaporator^[1]
Chiller: USA Lamb UC 50/30 Chiller; low temp; recirculating; maintains system stability during deposition runs^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationIncludes Vacuum pumps, Chamber, & Mounting Pieces^[1]
ConfigurationHigh Voltage^[1]
Power unitARCO Temescal, high voltage^[1]
Included componentsVacuum pumps, chamber, mounting pieces^[1]
Included componentsVacuum pumps, chamber, and mounting pieces^[1]
Power unitARCO Temescal Power Unit; high voltage^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Varian 3118 10 E?

The Varian 3118 10 E is an e-beam evaporator.^[1]

Is the Varian 3118 10 E configured as an integrated system?

The Varian 3118 10 E is configured as an integrated system.^[1]

Does the Varian 3118 10 E include film-thickness monitoring?

The Varian 3118 10 E includes a DYN-Optics 580 D optical monitor for real-time film thickness and deposition control.^[1]

Not publicly documented

The following facts about the 3118 10 E E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3118 10 E E-Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 3118 10 E E-Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 3118 10 E E-Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3118 10 E E-Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3118 10 E E-Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report