Tool family
Varian 350D is described as an industry-standard medium current ion implanter that was the predecessor of the 300 XP and was the tool of choice during the early 1980s.
The Varian 350D is a medium current ion implanter that was the tool of choice for semiconductor doping in the early 1980s.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 300 XP | — | 1986 | Evolved from the Varian 350D; introduced with process recipe control, independent dual end stations, and improved dosimetry. | web.archive.org[1] |