Waferpedia

Tool family

Varian 350D

Varian 350D is described as an industry-standard medium current ion implanter that was the predecessor of the 300 XP and was the tool of choice during the early 1980s.

Models in this family

  1. 350Dintroduced 1986produced 1986Discontinued

    The Varian 350D is a medium current ion implanter that was the tool of choice for semiconductor doping in the early 1980s.