Tool family
Varian E 500 HP Medium Current Ion
Varian E 500 HP Medium Current Ion Implanter.
Models in this family
The Varian E 500 HP is a medium current ion implanter with a 6-inch wafer size.
Tool family
Varian E 500 HP Medium Current Ion Implanter.
The Varian E 500 HP is a medium current ion implanter with a 6-inch wafer size.
