Varian
E 500 HP Medium Current Ion
What is it?
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
- Convert from LL Cryos to Turbo Pumps[1]
Control & software1
- Control system upgrade[1]
Configuration & options10
- 5 Wire[1]
- Upgraded from E220 to E500 by AMAT in 2019:[1]
- IHC HE++ Only SRC Bernas Upgrade[1]
- SiF4 & external Helium Upgrade[1]
- 150mm size conversion[1]
- KIT,E-CLAMP SIZE,150MM *UPG*[1]
- 150mm conversion with E-Clamp[1]
- Later converted to 150mm mechanical clamp[1]
- Flat Panel's Display upgrade[1]
- Air Bearing + Replacement[1]
Vintage & configurations
- 2019Upgrade to E500[1]
Upgraded from E220 to E500 by AMAT in 2019.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Varian E 500 HP?
It is a medium current ion implanter.[1]
Not publicly documented
The following facts about the E 500 HP Medium Current Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the E 500 HP Medium Current Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 500 HP Medium Current Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the E 500 HP Medium Current Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the E 500 HP Medium Current Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 500 HP Medium Current Ion are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Jul 29, 2026.
