Tool family
Varian EHP 500 Ion
Varian EHP 500 Ion Implanter.
Models in this family
The Varian EHP 500 Ion Implanter is an ion implantation tool with 8 inch wafer support.
Tool family
Varian EHP 500 Ion Implanter.
The Varian EHP 500 Ion Implanter is an ion implantation tool with 8 inch wafer support.
