Waferpedia

Tool family

Varian EHPI E 220

VarianIon Implantation1 entry

Varian EHPI E 220 Implanter.

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Models in this family

  1. EHPI E 220

    The Varian EHPI E 220 is an ion implanter described as an 8-inch, medium-current system with a SMIF interface.