Varian

EHPI E 220

Ion Implantation Varian EHPI E 220 family

Research Quality: 30% complete

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EHPI E 220 — Inventory photo — Fig. 01EHPI E 220Inventory photo^[1]

Power

3 Phase, 208 V^[1]

Vacuum

Cryopump on board 4 f^[1]

Gas delivery

4 Sticks, HP and SDS 2 in use^[1]

What is it?

The Varian EHPI E 220 is an ion implanter described as an 8-inch, medium-current system with a SMIF interface.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Not working
Missing Tplm Board & Platen

What do the numbers mean?

Power & electrical2

Line Voltage: 3 Phase, 208 V^[1]
Line Frequency: 50 / 60 Hz^[1]

Vacuum & pumping2

Type: Cryopump on board 4 f^[1]; Pump Options:^[1]

Wafer handling4

Loadlock / Cassete:^[1]
Cassette Stage: 200 mm (8") Standard^[1]
Wafer Mapping: Optical Sensor^[1]; Transfer Chamber^[1]

Gas & chemistry2

Gas Box: 4 Sticks, HP and SDS 2 in use^[1]
HE MFC Size: Optional^[1]

Control & software1

SMIF Interface: Varian Interface for Brooks SMIFS^[1]

Configuration & options9

Medium Current^[1]
UPS: CVCS^[1]; Chamber A - DPN (Aluminum)^[1]; Chambers (2)^[1]; Status Light Tower:^[1]
Lamp Colors: Red, Orange, Green^[1]; Heat Exchanger / Chiller:^[1]
Chiller: Heat Exchange^[1]
DI Cart: EHPI with B-Pure Filters^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Line Voltage3 Phase, 208 V^[1]
Line Frequency50 / 60 Hz^[1]
Gas Box4 Sticks, HP and SDS 2 in use^[1]
HE MFC SizeOptional^[1]
TypeCryopump on board 4 f^[1]
ConfigurationPump Options:^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the EHPI E 220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EHPI E 220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EHPI E 220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EHPI E 220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the EHPI E 220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EHPI E 220 are on record.
Answerable by: an OEM parts catalog or a service engineer