Waferpedia

Tool family

Veeco Dektak

VeecoMetrology & Inspection1 entry

Veeco Dektak 150 is a stylus-based surface profiler used for measuring surface topography and thin film step heights.

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Models in this family

  1. Dektak

    Veeco Dektak 150 is a stylus-based surface profiler used for measuring surface topography and thin film step heights.