Tool family
Veeco Nexus IBE350
The Veeco Nexus IBE350 is a broad-beam ion etcher with a 350 mm Argon ion source, three-grids ion optics, and SIMS endpoint detection.
Models in this family
The Veeco Nexus IBE350 is a broad-beam ion etcher with a 350 mm Argon ion source, three-grids ion optics, and SIMS endpoint detection.
