Tool family
The Carl Zeiss 1540EsB Crossbeam is a FIB/SEM system with an FESEM electron column, a Ga ion column, gas injection for Pt, W, and SiOx deposition, and multiple detector options.
The Carl Zeiss 1540EsB Crossbeam is a FIB/SEM system with an FESEM electron column, a Ga ion column, gas injection for Pt, W, and SiOx deposition, and multiple detector options.