Waferpedia

Tool family

Zeiss CrossBeam 550

ZeissMetrology & Inspection1 entry

The Zeiss SEM Crossbeam 550 is a scanning electron microscope configured at CMi for imaging dedicated to process control and supported with metrology and analysis software.

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Models in this family

  1. CrossBeam 550

    The Zeiss SEM Crossbeam 550 is a scanning electron microscope configured at CMi for imaging dedicated to process control and supported with metrology and analysis software.