Tool family
Zeiss LEO
Models in this family
The Zeiss Leo 1530 FE-SEM is a field emission scanning electron microscope with multiple detectors and an Oxford EDX detector.
The Zeiss Leo 1550 is a scanning electron microscope.
The Zeiss LEO 1560 is a scanning electron microscope with a 6-inch stage and loadlock, Schottky field emission gun, and in-lens SE and E-T SE detectors.
All entries
- Leo 1530 FE-SEMZeiss
The Zeiss Leo 1530 FE-SEM is a field emission scanning electron microscope with multiple detectors and an Oxford EDX detector.
CategoryMetrology & Inspection8 specs - Leo 1550Zeiss
The Zeiss Leo 1550 is a scanning electron microscope.
CategoryMetrology & Inspection1 spec - LEO 1560Zeiss
The Zeiss LEO 1560 is a scanning electron microscope with a 6-inch stage and loadlock, Schottky field emission gun, and in-lens SE and E-T SE detectors.
CategoryMetrology & InspectionWafer6” wafer loading through the loadlock is possible19 specs