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Tool family

Zeiss Orion NanoFab

The Zeiss ORION NanoFab is a focused ion beam microscope used for ultrahigh-resolution imaging, direct writing, and lithography, operating with either He or Ne beams.

Models in this family

  1. The Zeiss ORION NanoFab is a focused ion beam microscope used for ultrahigh-resolution imaging, direct writing, and lithography, operating with either He or Ne beams.