Zeiss
Orion NanoFab
What it is
How it works
Applications
Stated applications include ultrahigh-resolution imaging, direct writing, lithography, and imaging of non-conductive samples with the aid of an electron flood gun.[1]
- Imaging
- Direct writing
- Lithography
What do the numbers mean?
Optics & imaging4
Configuration & options3
- Sample capability
- Non-conductive samples can be imaged with the aid of an electron flood gun[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of instrument is the Zeiss ORION NanoFab?
It is a focused ion beam microscope used as an ultrahigh-resolution imaging, direct writing, and lithography platform.[1]
What beams does it use?
It operates with either helium or neon.[1]
What is the helium beam used for?
The helium beam is used for ultrahigh-resolution imaging and patterning, with a probe of about 0.5 nm and sub-5 nm resolution images and patterns with large depth of field.[1]
What is the neon beam used for?
The neon beam is used for direct write and lithography applications between 10 and 100 nm.[1]
Can non-conductive samples be imaged?
Yes. Non-conductive samples can be imaged with the aid of an electron flood gun.[1]
Not publicly documented
The following facts about the Orion NanoFab are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Orion NanoFab are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Orion NanoFab are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Orion NanoFab are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Orion NanoFab are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Orion NanoFab is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nano.upenn.edu — nano.upenn.edunano.upenn.edu
Last updated Jul 24, 2026.
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