Waferpedia

Tool family

Zeiss Supra 55

ZeissMetrology & Inspection2 entries
LinkedIn X Email

Models in this family

  1. Supra 55

    Zeiss Supra 55 is a metrology and inspection instrument used for high-resolution examination of materials and device surfaces. It belongs to the class of electron microscope systems used to inspect fine structural detail that is difficult to resolve with conventional optical methods.

    Cited variants

    DesignationGenerationVintageChangesSource
    Supra 55 VP——Variable-pressure version; sources state high-vacuum and VP modes, with a load-lock system on one source and VP capability up to 1.33 mbar on another.bu.edu[1]
    Supra 55 FESEM——Described as a FESEM with a Schottky thermal field emission source.cmdis.rpi.edu[2]
  2. Supra 55 VP

    The Zeiss Supra 55 VP is a variable-pressure scanning electron microscope with TFE source type, Windows 10, and SmartSEM v6.

All entries

  1. Supra 55Zeiss

    General referenceZeiss Supra 55 is a metrology and inspection instrument used for high-resolution examination of materials and device surfaces. It belongs to the class of electron microscope systems used to inspect fine structural detail that is difficult to resolve with conventional optical methods.

    CategoryMetrology & Inspection
    15 specs
  2. Supra 55 VPZeiss

    The Zeiss Supra 55 VP is a variable-pressure scanning electron microscope with TFE source type, Windows 10, and SmartSEM v6.

    CategoryMetrology & Inspection
    7 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu